CoWoS®

台積公司領先全球的CoWoS®先進2.5D封裝技術為高效能運算(High-Performance Computing, HPC)與人工智慧(Artificial Intelligence, AI)產品提供核心基礎。透過整合多個系統單晶片(System-on-Chip, SoC)和高頻寬記憶體(High-Bandwidth Memory, HBM)等各種小晶片,CoWoS® 賦予產品卓越的運算效能與記憶體頻寬。CoWoS®-S 可支援到 3.3 倍光罩尺寸(約 2700平方毫米)的中介層(Interposer)。若中介層尺寸大於 3.3 倍光罩,則建議採用 CoWoS®-L 或 CoWoS®-R。多樣化的互連選項提供了整合的靈活性,以滿足各項效能目標。

自2012年量產以來,CoWoS®不斷演進,更提供多種選擇。隨著2022年底生成式人工智慧(Generative AI)的出現,市場對CoWoS®技術的需求變得更為強勁。

為支援下一世代高效能運算(HPC)、人工智慧(AI)和行動應用等產品,台積持續擴大先進封裝產能,協助客戶加速創新,以因應瞬息萬變的市場挑戰。

 

台積公司的CoWoS®-S解決方案為超高效能運算應用,提供最頂尖的封裝技術。晶圓級系統整合技術可在大面積的矽中介層上實現高密度互連佈線與嵌入式深溝槽電容(Embedded Deep Trench Capacitor, eDTC),在其上方整合邏輯小晶片(Logic Chiplet)與高頻寬記憶體(High-Bandwidth Memory, HBM)等各類功能晶片。CoWoS 自 2012 年起已投入量產,其矽中介層(Silicon Interposer)尺寸最高可達 3.3 倍光罩。

CoWoS<sup>®</sup>-S

CoWoS®-R先進封裝服務藉由多層線路重佈層(Redistribution Layer, RDL)中介層,連接系統單晶片(System-on-Chip, SoC)及/或高頻寬記憶體(High-Bandwidth Memory, HBM)晶片,自2023年起投入量產,以實現異質整合。RDL中介層由聚合物與銅導線組成,且相對具有韌性,能增強C4焊點的完整性,支援較大尺寸的封裝,以滿足極其複雜的功能需求。

CoWoS<sup>®</sup>-R

CoWoS®-R的主要特點包括:

  1. 用於佈線的 RDL 中介層,最小間距(Pitch)為 4 微米(即 2 微米線寬/距)。
  2. RDL 互連技術藉由較低 RC 值的佈線,提供良好的訊號與電源完整性,從而實現高數據傳輸速率。共面度「接地-訊號-接地-訊號-接地」(GSGSG)佈局與 RDL 互連的層間接地屏蔽,提供了卓越的電性效能。
  3. 針對系統單晶片(SoC)與對應基板之間的熱膨脹係數(CTE)不匹配問題,RDL 層與 C4 凸塊/底部填充(UF)層提供了極佳的緩衝,大幅降低了 C4 凸塊區域的應變能密度(Strain Energy Density)。

CoWoS®-L先進封裝服務結合線路重佈層(RDL)和高密度嵌入式局部矽基互連(Local Silicon Interconnect,LSI)、嵌入式深溝槽電容(eDTC),以及能夠整合各種嵌入式晶片的優勢協助高效能產品擴展至更大尺寸。

台積首個3.5倍光罩尺寸的CoWoS®-L已於2024年投入生產。緊接著,為滿足更高封裝性能與 AI 算力需求,CoWoS-L 持續擴大中介層尺寸,以便在 CoWoS 封裝中整合更多矽晶片(Silicon)與記憶體。

CoWoS®-L的主要特點包括:

  1. 嵌入式局部矽基互連(LSI)晶片透過多層次微米銅導線,實現高佈線密度的晶粒對晶粒(Die-To-Die)互連。LSI 晶片在各項產品中可具備多種連接架構,例如:系統單晶片(SoC)對 SoC、SoC 對小晶片(Chiplet)、SoC 對高頻寬記憶體(HBM),並可重複用於多種產品。其對應的金屬類型、層數與間距均與 CoWoS®-S 所提供的規格一致。
  2. 在正面與背面均具有寬間距的線路重佈層(RDL)模塑中介層,在傳輸訊號與電源時,能在高速傳輸時提供低損耗的高頻訊號表現。
  3. 具備整合其他元件的能力,例如可在 SoC 晶粒下方整合獨立的嵌入式深溝槽電容器(eDTC),以優化電源管理。
CoWoS<sup>®</sup>-L
The Chronicle of CoWoS
  • 2024
    • News Release
      2024/01/10
      GUC Taped Out UCIe 32G IP using TSMC's 3nm and CoWoS Technology
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  • 2023
    • News Release
      2023/04/06
      GUC Taped Out 3nm 8.6Gbps HBM3 and 5Tbps/mm GLink-2.5D IP using TSMC Advanced Packaging Technology
      LEARN MORE
  • 2022
    • News Release
      2022/07/07
      GUC Demonstrate World's First HBM3 PHY, Controller, and CoWoS Platform at 7.2 Gbps
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      2022/03/10
      GUC announces 2.5D and 3D multi-die APT platform for AI, HPC, networking ASICs
      LEARN MORE
  • 2021
    • Industry Publication
      ECTC 2021
      Wafer Level System Integration of the Fifth Generation CoWoS®-S with High Performance Si Interposer at 2500 mm2
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    • News Release
      2021/08/31
      GUC Announces Industry Highest Bandwidth and Power Efficient Die-to-Die (GLink 2.0) Total Solution
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      2021/06/08
      GUC Tapes Out AI/HPC/Networking Platform on TSMC CoWoS® Technology Validating 7.2 Gbps HBM3 Controller and PHY, GLink-2.5D and 112G-LR SerDes IPs
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  • 2020
    • Industry Publication
      ECTC 2020
      Design and Analysis of Logic-HBM2E Power Delivery System on CoWoS® Platform with Deep Trench Capacitor
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    • News Release
      2020/11/17
      GUC Die-to-Die (D2D) Total Solution Opening the New Era of Flagship SoC
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      2020/09/09
      Rambus Advances HBM2E Performance to 4.0 Gbps for AI/ML Training Applications
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      2020/03/03
      TSMC and Broadcom Enhance the CoWoS Platform with World’s First 2X Reticle Size Interposer
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  • 2019
    • Industry Publication
      IEDM 2019
      Integrated Deep Trench Capacitor in Si Interposer for CoWoS Heterogeneous Integration
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    • Production Milestone
      More than 60 product tape-outs are in production or in development as of Aug. 2019
    • Customer Product
      Industry 1st 7nm GPU w/ deep learning accelerator
      • 1TB/s in BW
      • 4 HBM2
      • 1X reticle interposer
      AI training accelerator w/ 1.2TB/s in BW
      • N16+
      • 4 HBM2
      • 1.5X reticle interposer
  • 2018
    • Customer Product
      Fujitsu A64FX
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      Build your 56G Enterprise Networking ASICs with MediaTek
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  • 2017
    • Customer Product
      Broadcom Announces Industry's First Silicon-Proven 7nm IP for ASICs in Deep Learning and Networking Applications
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      NEC "Aurora" Vector Engine vector processor
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      Nvidia TESLA GV100
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    • Industry Publication
      IEEE Transaction on electronics devices 2017
      Wafer-Level Integration of an Advanced Logic-Memory System Through the Second-Generation CoWoS Technology
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      IEDM 2017
      Advanced Heterogeneous Integration Technology Trend for Cloud and Edge
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  • 2016
    • Customer Product
      Nvidia TESLA GP100
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      Industry's first ASIC based AI accelerator from learning only to learning+inference
    • Industry Publication
      SEMICON Taiwan 2016
      Interposer Technology: Past, Now, and Future
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      SEMICON Taiwan 2016
      WLSI Extends Si Processing and Supports Moore's Law
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  • 2015
  • 2014
    • Customer Product
      HiSilicon Hi1616
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    • Industry Publication
      IEDM 2014
      A manufacturable interposer MIM decoupling capacitor with robust thin high-K dielectric for heterogeneous 3D IC CoWoS wafer level system integration
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      IEDM 2014
      Wafer Level System Integration for SiP
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      CICC 2014
      New System-in-Package (SiP) Integration technologies
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  • 2013
    • Industry Publication
      VLSI 2013
      Manufacturability Optimization and Design Validation Studies for FPGA-Based, 3D Integrated Circuits
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      IITC 2013
      Innovative Wafer-based Interconnect Enabling System Integration and Semiconductor Paradigm Shifts
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      ECTC 2013
      Reliability Evaluation of a CoWoS-enabled 3D IC Package
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  • 2012
    • Customer Product
      Xilinx 7V2000T/7V580T
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    • Industry Publication
      VLSI 2012
      An ultra-thin interposer utilizing 3D TSV technology
      LEARN MORE
  • 2011
    • Industry Publication
      ECTC 2011
      Advanced Reliability Study of TSV Interposers and Interconnects for the 28nm Technology FPGA
      LEARN MORE

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