Integrated Fan-Out (InFO) Wafer Level Packaging

InFO is an innovative wafer level system integration technology platform, featuring a high-density redistribution layer (RDL) and Through InFO Vias (TI) for high-density interconnect and performance in a variety of applications, including mobile and high-performance computing. The InFO platform offers 2.5D and 3D options optimized for specific applications.

InFO-PoP, the industry’s first 3D wafer-level fan-out package, features a high density RDL and TIVs to integrate mobile application processors with dynamic random access memory (DRAM). InFO-PoP has better electrical and thermal performance, and a thinner profile than flip chip package-on-package, because it has no organic substrate or C4 bump.

InFO_PoP

InFO-oS leverages Integrated Fan-Out (InFO) technology and features a higher density 2/2µm re-distribution interconnection (RDL) line width/space to integrate multiple advanced logic chiplets for 5G networking applications. It enables hybrid pad pitches on system-on-a-chip (SoC) with a minimum 36µm Input/Output (I/O) pitch, a minimum 130µm C4 copper bump pitch and a 2.5X reticle size InFO on 110x110 mm substrates. More chiplet packaging adoption is expected in a variety of next generation products.

InFO_oS
The Chronicle of InFO
  • 2021
    • News Release
      2021/08/31
      GUC Announces Industry Highest Bandwidth and Power Efficient Die-to-Die (GLink 2.0) Total Solution
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  • 2020
    • News Release
      2020/11/17
      GUC Die-to-Die (D2D) Total Solution Opening the New Era of Flagship SoC
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  • 2019
    • Production Milestone
      More than 20 product tape-outs are in production or in development as of Aug. 2019
      TSMC has been shipping InFO in high volume since 2016
    • Customer Product
      N16 Network SoC
      • L/S < 2/2 µm
      • 1.5X reticle
    • Industry Publication
      ECTC 2019
      3D-MiM (MUST-in-MUST) Technology for Advanced System Integration
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      ECTC 2019
      Signal Integrity of Submicron InFO Heterogeneous Integration for High Performance Computing Applications
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  • 2018
    • Customer Product
      N16 Network SoC
      • L/S < 2/2 µm
      • 1X reticle
      N7 Mobile SoC
      • L/S < 10/10 µm
      • PoP height < 1 mm
      N7 Wearable SoC
      • L/S < 10/10 µm
      • PoP height < 0.9 mm
    • Industry Publication
      ECTC 2018
      A Novel Submicron Polymer Re-Distribution Layer Technology for Advanced InFO Packaging
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      ECTC 2018
      High Performance, High Density RDL for Advanced Packaging
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      ECTC 2018
      InFO_AiP Technology for High Performance and Compact 5G Millimeter Wave System Integration
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  • 2017
    • Production Milestone
      National Industrial Innovation Award
    • Customer Product
      N10 Mobile SoC
      • L/S < 10/10 µm
      • PoP height < 1 mm
    • Industry Publication
      IEDM 2017
      Advanced heterogeneous integration technology trend for cloud and edge
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      IRPS 2017
      CPI advancement in integrated fan-out (InFO) technology
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      ECTC 2017
      High Performance Chip-Partitioned Millimeter Wave Passive Devices on Smooth and Fine Pitch InFO RDL
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  • 2016
    • Customer Product
      N16 Mobile SoC
      • L/S < 10/10 µm
      • PoP height < 1 mm
    • Industry Publication
      IEDM 2016
      Ultra-low-resistance 3D InFO inductors for integrated voltage regulator applications
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      ECTC 2016
      Analysis and Comparison of Thermal Performance of Advanced Packaging Technologies for State-of-the-Art Mobile Applications
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      ECTC 2016
      InFO (Wafer Level Integrated Fan-Out) Technology
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      ECTC 2016
      Signal and Power Integrity Analysis on Integrated Fan-Out PoP (InFO_PoP) Technology for Next Generation Mobile Applications
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  • 2015
    • Industry Publication
      IEDM 2015
      High performance passive devices for millimeter wave system integration on integrated fan-out (InFO) wafer level packaging technology
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      IEEE 2015 International 3D Systems Integration Conference
      Power Saving and Noise Reduction of 28nm CMOS RF SystemIntegration Using Integrated Fan-Out Wafer Level Packaging (InFO-WLP) Technology
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  • 2013
    • Industry Publication
      IEDM 2013
      Array Antenna Integrated Fan-out Wafer Level Packaging (InFO-WLP) for Millimeter Wave System Applications
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      VLSI 2013
      High-Performance Inductors for Integrated Fan-Out Wafer Level Packaging (InFO-WLP)
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  • 2012
    • Industry Publication
      IEDM 2012
      High-Performance Integrated Fan-Out Wafer Level Packaging (InFO-WLP): Technology and System Integration
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